One-Pot Synthesis of CeO2-SiO2Composite Abrasives for High-Performance Chemical Mechanical Planarization: Synergistic Chemical-Mechanical Polishing

Junjie Xue; Haining Zhang; Shuming Wu; Bo Gao; Fangwei Lu; Chengrui Xin; Yan Zhao; Simin Li; Hui Shen

doi:10.54254/2755-2721/2026.31957

Article Information

Received: 25 February 2026

Published: 2 March 2026

DOI: https://doi.org/10.54254/2755-2721/2026.31957

Article Type: Research Article

Cite this article

Xue,J.;Zhang,H.;Wu,S.;Gao,B.;Lu,F.;Xin,C.;Zhao,Y.;Li,S.;Shen,H. (2026). One-Pot Synthesis of CeO2-SiO2Composite Abrasives for High-Performance Chemical Mechanical Planarization: Synergistic Chemical-Mechanical Polishing. Applied and Computational Engineering,212,34-41.

Data availability

The datasets used and/or analyzed during the current study will be available from the authors upon reasonable request.

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About this Volume

Volume Title: ACE Vol.212

Part of Series: Applied and Computational Engineering

ISSN: 2755-2721 (Print) / 2755-273X (Online)

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